Ammoniumfluorid-Lösung 40% VLSI, Halbleiter-Qualität (Honeywell 17600)
Lieferant: Honeywell Chemicals
|
Gefahr
|
HONC40292H-5LEA
158.5
CHF
HONC40292H-5L
Ammoniumfluorid-Lösung 40% VLSI, Halbleiter-Qualität (Honeywell 17600)
Ammonium fluoride
|
Formel:
NH₄F MW: 37,04 g/mol Siedepunkt: >100 °C (1,013 hPa) Dichte: 1,110 g/cm³ (20 °C) Lager Temperatur: Raumtemperatur |
MDL Number:
MFCD00011423 CAS-Nummer: 12125-01-8 UN: 3287 ADR: 6.1,III |
Spezifikation Testergebnisse
| Particles > 0,5 µm | Max. 250 P/ml |
| Assay | 40 - 41 % |
| Residue on ignition (SO₄) | Max. 10 ppm |
| pH (1 %,20°C) | 6.2 - 7.0 |
| Silver (Ag) | Max. 0.05 ppm |
| Aluminium (Al) | Max. 0.05 ppm |
| Arsenic, antimony (as As) | Max. 0.03 ppm |
| Gold (Au) | Max. 0.02 ppm |
| Boron (B) | Max. 0.05 ppm |
| Barium (Ba) | Max. 0.01 ppm |
| Beryllium (Be) | Max. 0.01 ppm |
| Bismuth (Bi) | Max. 0.02 ppm |
| Calcium (Ca) | Max. 0.1 ppm |
| Cadmium (Cd) | Max. 0.01 ppm |
| Cobalt (Co) | Max. 0.01 ppm |
| Chromium (Cr) | Max. 0.01 ppm |
| Copper (Cu) | Max. 0.01 ppm |
| Iron (Fe) | Max. 0.05 ppm |
| Gallium (Ga) | Max. 0.01 ppm |
| Germanium (Ge) | Max. 0.05 ppm |
| Indium (In) | Max. 0.01 ppm |
| Potassium (K) | Max. 0.05 ppm |
| Lithium (Li) | Max. 0.01 ppm |
| Magnesium (Mg) | Max. 0.05 ppm |
| Manganese (Mn) | Max. 0.01 ppm |
| Molybdenum (Mo) | Max. 0.01 ppm |
| Sodium (Na) | Max. 0.1 ppm |
| Nickel (Ni) | Max. 0.01 ppm |
| Lead (Pb) | Max. 0.01 ppm |
| Platinum (Pt) | Max. 0.05 ppm |
| Silicon (Si) | Max. 200 ppm |
| Tin (Sn) | Max. 0.02 ppm |
| Strontium (Sr) | Max. 0.01 ppm |
| Titanium (Ti) | Max. 0.01 ppm |
| Thallium (Tl) | Max. 0.02 ppm |
| Vanadium (V) | Max. 0.01 ppm |
| Zinc (Zn) | Max. 0.05 ppm |
| Zirconium (Zr) | Max. 0.01 ppm |
| Ammonium hydrogen difluoride (NH₄HF₂) | Max. 200 ppm |
| Chloride (Cl) | Max. 4 ppm |
| Phosphate (PO₄) | Max. 0.2 ppm |
| Sulfate (SO₄) | Max. 2 ppm |
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