HMDS (1,1,1,3,3,3-Hexamethyldisilazan) ≥99,5% VLSI, elektronische Qualität
Lieferant: VWR Chemicals
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Gefahr
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Synonyms:
Bis(trimethylsilyl)amin
VWRC6686.2500EA
640
CHF
VWRC6686.2500
HMDS (1,1,1,3,3,3-Hexamethyldisilazan) ≥99,5% VLSI, elektronische Qualität
HMDS (1,1,1,3,3,3-Hexamethyldisilazan)
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Formel:
(CH₃)₃SiNHSi(CH₃)₃ MW: 161,39 g/mol Dichte: 0,78 g/cm³ (20 °C) Lager Temperatur: Raumtemperatur |
MDL Number:
MFCD00008259 CAS-Nummer: 999-97-3 EINECS: 213-668-5 UN: 1992 ADR: 3 (6.1, 8),II |
Spezifikation Testergebnisse
| Assay (GC) | ≥ 99.5 % |
| Impurity profile (GC) | Conforms |
| Colouration | ≤ 10 APHA |
| Particle size(<gt/>0.50 μm)(/ml)(at filling) | ≤ 200 |
| Evaporation residue | ≤ 10 ppm |
| Water | ≤ 500 ppm |
| Cl (Chloride) | ≤ 1000 ppb |
| Ag (Silver) | ≤ 10 ppb |
| Al (Aluminium) | ≤ 100 ppb |
| As (Arsenic) | ≤ 10 ppb |
| Au (Gold) | ≤ 20 ppb |
| B (Boron) | ≤ 10 ppb |
| Ba (Barium) | ≤ 20 ppb |
| Be (Beryllium) | ≤ 10 ppb |
| Bi (Bismuth) | ≤ 20 ppb |
| Ca (Calcium) | ≤ 100 ppb |
| Cd (Cadmium) | ≤ 10 ppb |
| Co (Cobalt) | ≤ 10 ppb |
| Cr (Chromium) | ≤ 10 ppb |
| Cu (Copper) | ≤ 10 ppb |
| Fe (Iron) | ≤ 50 ppb |
| Ga (Gallium) | ≤ 10 ppb |
| In (Indium) | ≤ 10 ppb |
| K (Potassium) | ≤ 20 ppb |
| Li (Lithium) | ≤ 10 ppb |
| Mg (Magnesium) | ≤ 20 ppb |
| Mn (Manganese) | ≤ 10 ppb |
| Mo (Molybdenum) | ≤ 10 ppb |
| Na (Sodium) | ≤ 100 ppb |
| Ni (Nickel) | ≤ 10 ppb |
| Pb (Lead) | ≤ 10 ppb |
| Pt (Platinum) | ≤ 50 ppb |
| Sb (Antimony) | ≤ 10 ppb |
| Sn (Tin) | ≤ 20 ppb |
| Sr (Strontium) | ≤ 10 ppb |
| Ti (Titanium) | ≤ 20 ppb |
| Tl (Thallium) | ≤ 10 ppb |
| V (Vanadium) | ≤ 10 ppb |
| Zn (Zinc) | ≤ 20 ppb |
| Zr (Zirconium) | ≤ 20 ppb |
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