HMDS (1,1,1,3,3,3-Hexamethyldisilazan), Halbleiter-Qualität (Honeywell 17713)

Lieferant: Honeywell Chemicals
Gefahr

Synonyms: Bis(trimethylsilyl)amin

HONC40215H-1LEA 695.19 CHF
HONC40215H-1L
HMDS (1,1,1,3,3,3-Hexamethyldisilazan), Halbleiter-Qualität (Honeywell 17713)
HMDS (1,1,1,3,3,3-Hexamethyldisilazan)
Formel: (CH₃)₃SiNHSi(CH₃)₃
MW: 161,39 g/mol
Siedepunkt: 126 °C (1,013 hPa)
Melting Pt: -80 °C
Dichte: 0,770…0.775 g/cm³ (20 °C)
Flash-Pt: 25,9 %(V)
Lager Temperatur: Raumtemperatur
MDL Number: MFCD00008259
CAS-Nummer: 999-97-3
EINECS: 213-668-5
UN: 3286
ADR: 3,II
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Spezifikation Testergebnisse

Assay (GC) Min. 98 %
Density (D 20/4) 0.770 - 0.775
Refractive index (n 20/D) 1.4070 - 1.4090
Non-volatile matter Max. 5 ppm
Aluminium (Al) Max. 0.1 ppm
Arsenic, antimony (as As) Max. 0.01 ppm
Calcium (Ca) Max. 0.1 ppm
Copper (Cu) Max. 0.1 ppm
Iron (Fe) Max. 0.1 ppm
Sodium (Na) Max. 0.5 ppm
Lead (Pb) Max. 0.05 ppm
Zinc (Zn) Max. 0.1 ppm
Chloride (Cl) Max. 5 ppm

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